Welcome: Tianjin QM Optics Co., Ltd.
sales@qimglass.com +86 177 2018 9205
Home      Products     Quartz Glass tubes       Fused Silica Tubes for 172nm Excimer Lam
  • Fused Silica Tubes for 172nm Excimer Lamps

Fused Silica Tubes for 172nm Excimer Lamps

  • Product Item : QiM60-018
  • Category: Quartz Glass tubes
  • Material: High purity silica glass
  • OH content ≤300 ppm
  • Application: 172nm Excimer Lamps
  • Minimum Order Quantity: Negotiable
  • INQUIRY   EMAIL

High Purity Fused Silica Tubes for 172nm Excimer Lamps

The fused silica tubes are high purity, outstanding transmission in the deep UV, resistance to deep UV radiation, with OH content less than 300 ppm, almost free of any bubbles and inclusions.
It is used for cleaning of surfaces in the process of semiconductor wafers and flat panel displays, photochemical vapour deposition, activation of surface, photochemistry, 172nm excimer lamps.
There are many sizes for options, and custom production is available for specific requirement of customer.

Product Features
• High purity, outstanding transmission in the deep UV
• OH content ≤300 ppm,
• Good geometrical performance,

• Free of scratches, bubbles, impurities


Standard Dimension (mm)

Type
OD
OD tolerance
Wall thickness
WT tolerance
Ovality
Siding
CSA deviation
Bow (mm/m)

Typical length
Synthetic Quartz Tube (Cylinder)
14-20
±0.3
1-4
±0.3
≤0.1
≤0.1
≤4%
≤0.7
≤1200
20-30
±0.4
1-4
±0.2
≤0.1
≤0.1
≤4%
≤0.7
≤1200
30-40
±0.4
1-5
±0.4
≤0.15
≤0.15
≤4%
≤1
≤1200
40-60
±0.8
4-15
±0.4
≤0.4
≤0.4
4%
≤0.8
≤1200
60-90
±1.75
15-27
±0.5
≤0.5
≤0.5
≤4%
≤1
≤1200
Synthetic Quartz Rod
14-20
±0.3
-
-
≤0.1
-
-
≤0.7
≤1700
20-30
±0.4
-
-
≤0.1
-
-
≤0.7
≤1700
30-40
±0.4
-
-
≤0.15
-
-
≤1
≤1700
40-60
±0.8
-
-
≤0.4
-
-
≤0.8
≤1700
60-90
±1
-
-
≤0.5
-
-
≤1
≤1700
90-120
±1.75
-
-
≤0.5
-
-
≤1
≤1700
120-150
±1.75
-
-
≤0.5
-
-
≤1
≤1700

Chemical Properties

Li
Na
K
Ca
Mg
Fe
Cu
Mn
Al
Ti
Ni
Co
B
Cr
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01
<0.01

Thermal Properties

Strain point (Viscosity 1014.5dPa·s)
1100℃
Annealing point (Viscosity 1013dPa·s)
1150℃
Softening point (Viscosity 107.6dPa·s)
1620℃
Long time operating temperature
950℃
Short time operating temperature
1200℃





INQUIRY